Product Category

Sensors

Displacement Sensors / Measurement Sensors

High Precision Measurement Sensor

ZW-8000 / 7000 / 5000 Series

ZW-SQ Series

ZS Series

Smart Sensor 2D Measurement Type

ZS Series

A Lineup for Ultra-high-precision Displacement Measurements That Take Smart Sensors into a New Realm

Line Up
Specification

Sensor Controllers

Model

ZS-HLDC11-N

ZS-HLDC41-N

No. of samples to average

1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096

Number of mounted Sensors

1 per Sensor Controller

External
 interface

Connection method

Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)

Serial
 I/O

USB 2.0

1 port, Full Speed (12 Mbps max.), MINI-B

RS-232C

1 port, 115,200 bps max.

Output

Judgment
 output

HIGH/PASS/LOW 3 outputs
 NPN open collector, 30 VDC, 50 mA
 max., residual voltage 1.2 V max.

HIGH/PASS/LOW: 3 outputs
 PNP open collector, 50 mA max.,
 residual voltage 1.2 V max.

Linear output

Selectable from 2 types of output, voltage or current (selected by slide switch on
 bottom).
 • Voltage output: -10 to 10 V, output impedance: 40
 • Current output: 4 to 20 mA, maximum load resistance: 300

Inputs

Laser OFF,
 ZERO reset
 timing, RESET

ON: Short-circuited with 0 V terminal
 or 1.5 V or less
 OFF: Open (leakage current: 0.1 mA
 max.)

ON: Short-circuited to supply voltage
 or within 1.5 V of supply voltage.
 OFF: Open (leakage current: 0.1 mA
 max.)

Functions

Display: Measured value, threshold value, voltage/current, received light amount,
 and resolution/terminal block output
 Sensing: Mode, gain, measurement object, head installation
 Measurement point: Average, peak, bottom, thickness, step, and calculations
 Filter: Smooth, average, and differentiation
 Outputs: Scaling, various hold values, and zero reset
 I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-
 measurement, and bank (switching and clear)
 System: Save, initialization, measurement information display, communications
 settings, key lock, language, and data load
 Task: Single task or multitask (up to 4)

Status indicators

HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and
 ENABLE (green)

Segment display

Main digital

8-segment red LED, 6 digits

Sub-digital

8-segment green LEDs, 6 digits

LCD

16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel
 matrix

Setting

Setting keys

Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and
 function keys (1 to 4)

Slide switch

Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and
 RUN)

Power supply voltage

21.6 V to 26.4 VDC (including ripple)

Current consumption

0.5 A max. (when Sensor Head is connected)

Ambient temperature

Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of protection

IP20 (IEC60529)

Materials

Case: Polycarbonate (PC)

Cable length

2 m

Weight

Approx. 280 g (excluding packing materials and accessories)

Accessories

Ferrite core (1), instruction sheet

ZS-HL series Sensor Heads

Model

ZS-HLDS2VT

ZS-HLDS5T

Optical system

Regular reflection

Diffuse reflection

Regular reflection

Measuring center
 distance

25 mm

50 mm

44 mm

Measuring range

±2 mm

±5 mm

±4 mm

Light source

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape

Line beam

Beam diameter *1

2.2mm × 45 μm

1.0mm × 30 μm

Linearity *2

±0.2% F.S.

±0.1% F.S.

Resolution *3

0.6 μm
 (No. of samples to average: 128)

0.25 μm
 (No. of samples to average: 512)

Temperature
 characteristic *4

±0.1% F.S./°C

0.01% F.S./°C

Sampling cycle

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
 4.4 ms (High-sensitivity Mode)

LED
 Indicators

NEAR
 indicator

Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

FAR
 indicator

Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Operating ambient
 illumination

Illumination on received light surface: 3000 lx or less (incandescent light)

Ambient
 temperature

Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of
 protection *5

IP67

Cable length 0.5 m: IP66,
 cable length 2 m: IP67

Materials

Case: Aluminum die-cast, Front cover: Glass

Cable length

2 m

0.5 m, 2 m

Weight

Approx. 350 g

Approx. 600 g

Accessories

ZS-HLDS2VT:
 Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
 ZS-HLDS5T/-HLDS10/-HLDS60/-HLDS150:
 Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet

Model

ZS-HLDS10

ZS-HLDS60

ZS-HLDS150

Optical system

Diffuse
 reflection

Regular
 reflection

Diffuse reflection

Diffuse reflection

Measuring center
 distance

100 mm

94 mm

600 mm

1,500 mm

Measuring range

±20 mm

±16 mm

±350 mm

±500 mm

Light source

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape

Line beam

Beam diameter *1

3.5mm × 60 μm

16 × 0.3 mm
 (at 500 mm)

40 × 1.5 mm
 (at 1,500 mm)

Linearity *2

±0.1% F.S.

±0.07% F.S.
 (250 to 750 mm)
 ±0.1% F.S.
 (750 to 950 mm)

±0.2% F.S.

Resolution *3

1 μm
 (No. of samples to average: 64)

μm (No. of samples to
 average: 64 at 250 mm),
 40 μm (No. of samples to
 average: 64 at 600 mm)

500 μm
 (No. of samples to
 average: 64)

Temperature
 characteristic *4

0.01% F.S./°C

Sampling cycle

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
 4.4 ms (High-sensitivity Mode)

LED
 Indicators

NEAR
 indicator

Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

FAR
 indicator

Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Operating ambient
 illumination

Illumination on received light surface:
 3000 lx or less (incandescent light)

Illumination on received
 light surface:
 1000 lx or less
 (incandescent light)

Illumination on received
 light surface:
 500 lx or less
 (incandescent light)

Ambient
 temperature

Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of
 protection *5

Cable length 0.5 m: IP66,
 cable length 2 m: IP67

IP66 *6

Materials

Case: Aluminum die-cast, Front cover: Glass

Cable length

0.5 m, 2 m

Weight

Approx. 600 g

Approx. 800 g

Accessories

ZS-HLDS2VT:
 Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
 ZS-HLDS5T/-HLDS10/-HLDS60/-HLDS150:
 Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet

1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
        The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the
        main beam. 

2. This is the error in the measured value with respect to an ideal straight line.
        Linearity may change according to the workpiece.
        The following options are available. 

Model

Diffuse reflection

Mirror reflection

ZS-HLDS2VT

---

Glass

ZS-HLDS5T

White alumina ceramic

Glass

ZS-HLDS10

White alumina ceramic

ZS-HLDS60/HLDS150

White alumina ceramic

---

3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance
        in high-precision mode when the number of samples to average is set to within the graph.
        The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available. 

Model

Diffuse reflection

Mirror reflection

ZS-HLDS2VT

---

Glass

ZS-HLDS5T

White alumina ceramic

Glass

ZS-HLDS10

White alumina ceramic

ZS-HLDS60/HLDS150

White alumina ceramic

---

4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
 　　(typical example)
 5 Protection structure of connector area is IP40.
 6 Ask your OMRON representative about Sensor Heads with IP67 protection. 

ZS-L-series Sensor Heads

Model

ZS-LD20T

ZS-LD20ST

ZS-LD40T

ZS-LD10GT

ZS-LD15GT

Optical system

Regular
 reflection

Diffuse
 reflection

Regular
 reflection

Diffuse
 reflection

Diffuse
 reflection

Diffuse
 reflection

Regular reflection

Measuring center
 distance

20 mm

6.3 mm

20 mm

6.3 mm

40 mm

30 mm

10 mm

15 mm

Measuring range

±1 mm

±1 mm

±1 mm

±1 mm

±2.5 mm

±2 mm

±0.5 mm

±0.75 mm

Light source

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape

Line beam

Spot beam

Line beam

Beam diameter *1

900 × 25 μm

25 μm dia.

2,000 × 35 μm

Approx. 25 × 900 μm

Linearity *2

±0.1% F.S.

Resolution *3

0.25 μm

0.25 μm

0.4 μm

0.25 μm

0.25 μm

Temperature
 characteristic *4

0.04% F.S./°C

0.04% F.S./°C

0.02% F.S./°C

0.04% F.S./°C

Sampling cycle

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
 4.4 ms (High-sensitivity Mode)

LED
 Indicators

NEAR
 indicator

Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

FAR
 indicator

Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Operating ambient
 illumination

Illumination on received light surface: 3000 lx or less (incandescent light)

Ambient temperature

Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of protection
 *5

Cable length 0.5 m: IP66, cable length 2 m: IP67

IP40

Materials

Case: Aluminum die-cast, Front cover: Glass

Cable length

0.5 m, 2 m

Weight

Approx. 350 g

Accessories

Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2),
 insure locks (2), instruction sheet

Laser safety labels
 (1 each for JIS/EN),
 ferrite cores (2),
 insure locks (2)

1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
 The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
 2 This is the error in the measured value with respect to an ideal straight line.
 The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
 Linearity may change according to the workpiece.
 3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
 The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
 4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example)
 5 Protection structure of connector area is IP40. 

ZS-L series Sensor Heads

Model

ZS-LD50

ZS-LD50S

ZS-LD80

Optical system

Diffuse
 reflection

Regular
 reflection

Diffuse
 reflection

Regular
 reflection

Diffuse
 reflection

Regular　 
 reflection

Measuring center
 distance

50 mm

47 mm

50 mm

47 mm

80 mm

78 mm

Measuring range

±5 mm

±4 mm

±5 mm

±4 mm

±15 mm

±14 mm

Light source

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape

Line beam

Spot beam

Line beam

Beam diameter *1

900 × 60 μm

50 μm dia.

900 × 60 μm

Linearity *2

±0.1% FS

Resolution *3

0.8 μm

0.8 μm

2 μm

Temperature
 characteristic *4

0.02% FS/°C

0.02% FS/°C

0.01% FS/°C

Sampling cycle

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
 4.4 ms (High-sensitivity Mode)

LED
 Indicators

NEAR
 indicator

Lights near the measuring center distance, and closer than the measuring center distance
 inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received
 light amount is insufficient.

FAR
 indicator

Lights near the measuring center distance, and farther than the measuring center distance
 inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received
 light amount is insufficient.

Operating ambient
 illumination

Illumination on received light surface: 3000 lx or less (incandescent light)

Ambient temperature

Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of
 protection *5

Cable length 0.5 m: IP66, cable length 2 m: IP67

Materials

Case: Aluminum die-cast, Front cover: Glass

Cable length

0.5 m, 2 m

Weight

Approx. 350g

Accessories

Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
 instruction sheet

Model

ZS-LD130

ZS-LD200

ZS-LD350S

Optical system

Diffuse reflection

Regular reflection

Diffuse reflection

Regular reflection

Diffuse reflection

Measuring center
 distance

130 mm

130 mm

200 mm

200 mm

350 mm

Measuring range

±15 mm

±12 mm

±50 mm

±48 mm

±135 mm

Light source

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape

Line beam

Line beam

Spot beam

Beam diameter *1

600 × 70 μm

900 × 100 μm

240 μm dia.

Linearity *2

±0.1% FS

±0.25% FS

±0.1% FS

±0.25% FS

±0.1% FS

Resolution *3

3 μm

5 μm

20 μm

Temperature
 characteristic *4

0.02% FS/°C

0.02% FS/°C

0.04% FS/°C

Sampling cycle

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode),
 4.4 ms (High-sensitivity Mode)

LED
 Indicators

NEAR
 indicator

Lights near the measuring center distance, and closer than the measuring center distance
 inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received
 light amount is insufficient.

FAR
 indicator

Lights near the measuring center distance, and farther than the measuring center distance
 inside the measuring range.
 Flashes when the measurement target is outside of the measuring range or when the received
 light amount is insufficient.

Operating ambient
 illumination

Illumination on received light surface:
 2000 lx or less (incandescent light)

Illumination on received light surface:
 3000 lx or less (incandescent light)

Ambient temperature

Operating: 0 to 50°C, Storage: -15 to 60°C (with no icing or condensation)

Ambient humidity

Operating and storage: 35% to 85% (with no condensation)

Degree of
 protection *5

Cable length 0.5 m: IP66, cable length 2 m: IP67

Materials

Case: Aluminum die-cast, Front cover: Glass

Cable length

0.5 m, 2 m

Weight

Approx. 350g

Accessories

Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2),
 instruction sheet














1 Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value).
 The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
 2 This is the error in the measured value with respect to an ideal straight line.
 The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
 Linearity may change according to the workpiece.
 3 This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
 The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
 4 This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
 5 Protection structure of connector area is IP40.