Smart Sensor 2D Measurement Type

ZS Series

A Lineup for Ultra-high-precision Displacement Measurements That Take Smart Sensors into a New Realm

Smart Sensor

ZS-HL series Sensor Heads

Optical
 system

Sensing
 distance

Beam shape

Beam diameter

Resolution
 (see note)

Cable
 length

Model

Regular
 Reflective
 Models

25±2 mm

Line beam

2.2 mm × 45 μm

0.6 μm

2m

ZS-HLDS2VT 2M

0.5m

ZS-HLDS2VT 0.5M

Diffuse
 Reflective
 Models

50±5 mm

Line beam

1.0 mm × 0 μm

0.25 μm

2m

ZS-HLDS5T 2M

0.5m

ZS-HLDS5T 0.5M

100±20 mm

Line beam

3.5 mm × 60 μm

1 μm

2m

ZS-HLDS10 2M

0.5m

ZS-HLDS10 0.5M

600±350 mm

Line beam

16 mm × 0.3 mm

8 μm

2m

ZS-HLDS60 2M

0.5m

ZS-HLDS60 0.5M

1500±500 mm

Line beam

40 mm × 1.5 mm

500 μm

2m

ZS-HLDS150 2M

0.5m

ZS-HLDS150 0.5M

Note: Refer to the table of ratings and specifications for details. 

ZS-HL series Sensor Heads (For Nozzle Gaps)

Optical
 system

Sensing
 distance

Beam shape

Beam diameter

Resolution
 (see note)

Cable
 length

Model

Regular
 Reflective
 Models

10±0.5 mm

Line beam

900 × 25 μm

0.25 μm

2m

ZS-LD10GT 2M

0.5m

ZS-LD10GT 0.5M

15±0.75 mm

Line beam

900 × 25 μm

0.25 μm

2m

ZS-LD15GT 2M

0.5m

ZS-LD15GT 0.5M

Note: Refer to the table of ratings and specifications for details. 

ZS-L series Sensor Heads

Optical
 system

Sensing
 distance

Beam shape

Beam diameter

Resolution
 (see note)

Cable
 length

Model

Regular
 Reflective
 Models

20±1 mm

Line beam

900 × 25 μm

0.25 μm

2m

ZS-LD20T 2M

0.5m

ZS-LD20T 0.5M

Spot beam

25 μm dia.

0.25 μm

2m

ZS-LD20ST 2M

0.5m

ZS-LD20ST 0.5M

40±2.5 mm

Line beam

2000 × 35 μm

0.4 μm

2m

ZS-LD40T 2M

0.5m

ZS-LD40T 0.5M

Diffuse
 Reflective
 Models

50±5 mm

Line beam

900 × 60 μm

0.8 μm

2m

ZS-LD50 2M

0.5m

ZS-LD50 0.5M

Spot beam

50 μm dia.

0.8 μm

2m

ZS-LD50S 2M

0.5m

ZS-LD50S 0.5M

80±15 mm

Line beam

900 × 60 μm

2 μm

2m

ZS-LD80 2M

0.5m

ZS-LD80 0.5M

130±15 mm

Line beam

600 × 70 μm

3 μm

2m

ZS-LD130 2M

0.5m

ZS-LD130 0.5M

200±50 mm

Line beam

900 × 100 μm

5 μm

2m

ZS-LD200 2M

0.5m

ZS-LD200 0.5M

350±135 mm

Spot beam

240 μm dia.

20 μm

2m

ZS-LD350S 2M

0.5m

ZS-LD350S 0.5M

Note: No. of samples to average: 128 when set to High-precision Mode. 

ZS-HL series Sensor Controllers

Shape

Supply voltage

Control outputs

Model

 image

24 VDC

NPN outputs

ZS-HLDC11-N

PNP outputs

ZS-HLDC41-N

Accessories (Sold Separately)

Panel Mount Adapter

Shape

Model

image

ZS-XPM1

For 1st Controller

image

ZS-XPM2

For expansion
 (from 2nd Controller on)

RS-232C Cables

Connected to

Model

Qty

Personal computer (2 m)

ZS-XRS3

1

PLC/PT (2 m)

ZS-XPT3

Extension Cables for Sensor Heads

Cable length

Model

Qty

1 m

ZS-XC1A

1

4 m

ZS-XC4A

5 m

ZS-XC5B (*1,*2)

8 m

ZS-XC8A

10 m

ZS-XC10B (*1)

1 Up to two ZS-XC[]B Cables can be connected. (22 m max.)
 2 The ZS-XC3BR (3 m) and ZS-XC5BR (5 m) Robot Cables are also available. 

Long Extension Cables for Sensor Heads (Used with a Digital Equalizer for ZS-HL Series)

Name

Model

Qty

Digital Equalizer (Relay)

ZS-XEQ

1

Extension Cable (long distance, flexible 15 m cable)

ZS-XC15CR

1

Extension Cable (long distance, flexible 25 m cable)

ZS-XC25CR

1

Digital Equalizer Connection Cable (0.2 m)

ZS-XC02D

1

Logging Software

Name

Model

SmartMonitor Professional

ZS-SW11V3E

Realtime Parallel Output Unit (for ZS-HL Series)

Shape

Control outputs

Model

image

NPN outputs

ZG-RPD11-N

PNP outputs

ZG-RPD41-N

Memory Cards

Model

Capacity

HMC-EF283

256 MB

HMC-EF583

512 MB