Wafer-carrier Mounting Photomicrosensors

EE-SPY801 / 802

Photomicrosensors for detecting wafer-carrier mounting.

Sensors

Appearance

Sensing
 method

Sensing
 distance

Output configuration

Cable length

Model

 image

Reflective type

0 to 3 mm
 (Infrared light)

Turns ON when wafer carrier is
 present.

2 m

EE-SPY801 2M

image

EE-SPY802 2M

Accessories (Order Separately)

Item

Model

Pedestal

EE9-C01

EE9-C02

Note: There are no sensor functions provided.