Wafer-carrier Mounting Photomicrosensors
EE-SPY801 / 802
Photomicrosensors for detecting wafer-carrier mounting.
Models |
EE- SPY801/802 |
|
Sensing distance |
0 to 5 mm ( White paper: 15 × 15 mm2, reflection factor: 90%) |
|
Sensing object |
Transparent or opaque wafer carriers |
|
Operation indicator |
Lit orange when object is detected. |
|
Light source |
GaAs infrared LED with a peak wavelength of 940 nm |
|
Supply voltage |
12 to 24 VDC ±10%, ripple (p-p): 5% max. |
|
Current consumption |
30 mA max. |
|
Control output |
NPN open collector: |
|
Response time |
5 ms max. |
|
Ambient illumination |
3,000 lx max. with incandescent light or sunlight on the surface of the receiver |
|
Ambient temperature range |
Operating: - 10 to +55 ° C |
|
Ambient humidity range |
Operating: 5% to 85% |
|
Vibration resistance |
Destruction: 1 to 500 Hz, 1.0-mm single amplitude or 150 m/s2 each in X, Y, and Z directions |
|
Shock resistance |
Destruction: 500 m/s2 for 3 times each in X, Y, and Z directions |
|
Degree of protection |
IEC IP30 |
|
Connecting method |
Pre-wired (Standard length: 2 m) |
|
Weight (packaged) |
Sensor: Approx. 43 g; Accessory (Pedestal): Approx. 9 g |
|
Material |
Case |
Ethylene tetrafluoro ethylene (ETFE) |
Base plate |
Polybutylene phthalate (PBT) |
|
Accessories |
Instruction Manual |